Quantitative analysis of conductive coatings by radiofrequency-powered glow discharge optical emission spectrometry: hydrogen, d.c. bias voltage and density corrections

Radiofrequency‐powered glow discharge optical emission spectrometry (rf‐GDOES) can provide rapid quantitative depth profiles of both conductive and non‐conductive coatings. Examples of three types of conductive coatings are shown here: galvanized steel, a TiN hard coating and two electrical coatings...

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Veröffentlicht in:Surface and interface analysis 2002-06, Vol.33 (6), p.472-477
Hauptverfasser: Payling, Richard, Michler, Johann, Aeberhard, Max
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container_title Surface and interface analysis
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creator Payling, Richard
Michler, Johann
Aeberhard, Max
description Radiofrequency‐powered glow discharge optical emission spectrometry (rf‐GDOES) can provide rapid quantitative depth profiles of both conductive and non‐conductive coatings. Examples of three types of conductive coatings are shown here: galvanized steel, a TiN hard coating and two electrical coatings. Expected compositions and thicknesses were achieved when both d.c. bias voltage and hydrogen corrections were applied. A new algorithm for calculating the density of mixed metals, oxides and nitrides is presented. The hydrogen correction is also applied to the extreme surface of a metal coating for the first time. Copyright © 2002 John Wiley & Sons, Ltd.
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source Wiley Online Library Journals Frontfile Complete
subjects Applied sciences
Chemical composition analysis, chemical depth and dopant profiling
Cross-disciplinary physics: materials science
rheology
depth profile
Exact sciences and technology
galvanized steel
galvanized steel, TiN
GDOES
Materials science
Materials testing
Metals. Metallurgy
Physics
TiN
title Quantitative analysis of conductive coatings by radiofrequency-powered glow discharge optical emission spectrometry: hydrogen, d.c. bias voltage and density corrections
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