Preparation of carbon nanoparticles by plasma-assisted pulsed laser deposition method—size and binding energy dependence on ambient gas pressure and plasma condition

Nanometer-size carbon particles were prepared on a Si substrate using pulsed laser deposition (PLD) assisted by radio frequency (RF) Ar plasma and were compared with ones prepared by PLD in vacuum and Ar gas. In both the plasma and gas ambiences, experiments were carried out in Ar pressure p Ar rang...

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Veröffentlicht in:Thin solid films 2002-08, Vol.415 (1), p.15-20
Hauptverfasser: Suda, Y, Ono, T, Akazawa, M, Sakai, Y, Tsujino, J, Homma, N
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Sprache:eng
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