Facet type determination based on combined atomic force microscopy and electron backscatter diffraction

The distribution of facet types affects the functionality of the surfaces of polycrystalline films. However, we are not aware of a previously published convenient method to determine their distribution. This work describes and demonstrates a process to determine and map the Miller indexes (hkl) of c...

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Veröffentlicht in:Journal of microscopy (Oxford) 2023-04, Vol.290 (1), p.10-22
Hauptverfasser: Brüning, Ralf, Hajati, Mehrad, Lelièvre, Peter G., Bernhard, Tobias, Dieter, Sascha, Dietrich, Grégoire
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Sprache:eng
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