Interface loss mechanism of millimeter-wave coplanar waveguides on silicon
The interface loss mechanisms of coplanar waveguides (CPWs) on silicon with an SiO2 isolation layer are investigated. The total losses of straight CPW lines of 7.5-mm length are measured between 45 MHz and 40 GHz, and the interface contribution is extracted from that by its bias dependence. The inte...
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| Veröffentlicht in: | IEEE transactions on microwave theory and techniques 2002-01, Vol.50 (1), p.407-410 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
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