An extraction-based verification methodology for MEMS

Micromachining techniques are being increasingly used to develop miniaturized sensor and actuator systems. These system designs tend to be captured as layout, requiring extraction of the equivalent microelectromechanical circuit as a necessary step for design verification. This paper presents an ext...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	Journal of microelectromechanical systems 2002-02, Vol.11 (1), p.2-11
Hauptverfasser:	Baidya, B., Gupta, S.K., Mukherjee, T.
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuators Algorithms Applied sciences Boundary element method Circuit design Circuit simulation Circuits Computer aided design Computer science control theory systems Computer simulation Design Design engineering Equivalent circuits Exact sciences and technology Extraction Finite element method Geometry Government Instruments, apparatus, components and techniques common to several branches of physics and astronomy Integrated circuit interconnections Integrated circuit layout Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Methodology Microactuators Microelectromechanical systems Micromechanical devices Micromechanical devices and systems Microsensors Parasitic capacitance Physics Precision engineering, watch making Productivity Representations Schematic diagrams Sensor systems Software Studies Very large scale integration VLSI circuits
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Schreiben Sie den ersten Kommentar!