On the properties and functionality of ultra-thin diamond related protective coatings used in optical systems
In this work we investigate the applicability of sputtered developed films belonging to diamond related materials, like amorphous carbon (a-C), carbon nitride (CN x ), and boron nitride (BN x ) films, as protective overcoatings of optical systems. Their suitability is defined by the combination of o...
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| Veröffentlicht in: | Sensors and actuators. A, Physical Physical, 2002-04, Vol.99 (1), p.35-40 |
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| creator | Gioti, M. Logothetidis, S. Charitidis, C. Panayiotatos, Y. Varsano, I. |
| description | In this work we investigate the applicability of sputtered developed films belonging to diamond related materials, like amorphous carbon (a-C), carbon nitride (CN
x
), and boron nitride (BN
x
) films, as protective overcoatings of optical systems. Their suitability is defined by the combination of optical transparency (low absorption in the VIS energy region) with the high hardness and wear resistant character of the coating. The optical systems of our interest are electron-beam evaporated TiO
2/SiO
2 multi-layered coatings grown on polymeric substrates, which exhibit the optimum antireflective (AR) optical behavior but low wear durability and hardness. Within this research frame it was found a considerable enhancement of hardness of the AR optical coatings, which were studied by nanoindentation measurements, when an ultra-thin (∼100
Å) protective coating either of a-C, CN
x
or BN
x
is grown on top of them. In order to define which coating is the most proper one for such applications we extensively studied by spectroscopic ellipsometry the dielectric response and the optical properties of the developed films, as well as the combined reflectivity and optical response of the complete systems (AR/protective coatings). |
| doi_str_mv | 10.1016/S0924-4247(01)00887-1 |
| format | Article |
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x
), and boron nitride (BN
x
) films, as protective overcoatings of optical systems. Their suitability is defined by the combination of optical transparency (low absorption in the VIS energy region) with the high hardness and wear resistant character of the coating. The optical systems of our interest are electron-beam evaporated TiO
2/SiO
2 multi-layered coatings grown on polymeric substrates, which exhibit the optimum antireflective (AR) optical behavior but low wear durability and hardness. Within this research frame it was found a considerable enhancement of hardness of the AR optical coatings, which were studied by nanoindentation measurements, when an ultra-thin (∼100
Å) protective coating either of a-C, CN
x
or BN
x
is grown on top of them. In order to define which coating is the most proper one for such applications we extensively studied by spectroscopic ellipsometry the dielectric response and the optical properties of the developed films, as well as the combined reflectivity and optical response of the complete systems (AR/protective coatings).</description><identifier>ISSN: 0924-4247</identifier><identifier>EISSN: 1873-3069</identifier><identifier>DOI: 10.1016/S0924-4247(01)00887-1</identifier><language>eng</language><publisher>Lausanne: Elsevier B.V</publisher><subject>Antireflective coatings ; Boron nitride films ; Carbon-based films ; Condensed matter: electronic structure, electrical, magnetic, and optical properties ; Condensed matter: structure, mechanical and thermal properties ; Exact sciences and technology ; Insulators ; Nanoindentation studies ; Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation ; Optical properties of specific thin films ; Other nonelectronic physical properties ; Physical properties of thin films, nonelectronic ; Physics ; Protective coatings ; Spectroscopic ellipsometry ; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</subject><ispartof>Sensors and actuators. A, Physical, 2002-04, Vol.99 (1), p.35-40</ispartof><rights>2002 Elsevier Science B.V.</rights><rights>2003 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c368t-ae8328bfe94357e6140168c46c4879cfee0403d875dc8477f0f4080c384a6c563</citedby><cites>FETCH-LOGICAL-c368t-ae8328bfe94357e6140168c46c4879cfee0403d875dc8477f0f4080c384a6c563</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://www.sciencedirect.com/science/article/pii/S0924424701008871$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>309,310,314,776,780,785,786,3537,23909,23910,25118,27901,27902,65306</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=13751686$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Gioti, M.</creatorcontrib><creatorcontrib>Logothetidis, S.</creatorcontrib><creatorcontrib>Charitidis, C.</creatorcontrib><creatorcontrib>Panayiotatos, Y.</creatorcontrib><creatorcontrib>Varsano, I.</creatorcontrib><title>On the properties and functionality of ultra-thin diamond related protective coatings used in optical systems</title><title>Sensors and actuators. A, Physical</title><description>In this work we investigate the applicability of sputtered developed films belonging to diamond related materials, like amorphous carbon (a-C), carbon nitride (CN
x
), and boron nitride (BN
x
) films, as protective overcoatings of optical systems. Their suitability is defined by the combination of optical transparency (low absorption in the VIS energy region) with the high hardness and wear resistant character of the coating. The optical systems of our interest are electron-beam evaporated TiO
2/SiO
2 multi-layered coatings grown on polymeric substrates, which exhibit the optimum antireflective (AR) optical behavior but low wear durability and hardness. Within this research frame it was found a considerable enhancement of hardness of the AR optical coatings, which were studied by nanoindentation measurements, when an ultra-thin (∼100
Å) protective coating either of a-C, CN
x
or BN
x
is grown on top of them. In order to define which coating is the most proper one for such applications we extensively studied by spectroscopic ellipsometry the dielectric response and the optical properties of the developed films, as well as the combined reflectivity and optical response of the complete systems (AR/protective coatings).</description><subject>Antireflective coatings</subject><subject>Boron nitride films</subject><subject>Carbon-based films</subject><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties</subject><subject>Condensed matter: structure, mechanical and thermal properties</subject><subject>Exact sciences and technology</subject><subject>Insulators</subject><subject>Nanoindentation studies</subject><subject>Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation</subject><subject>Optical properties of specific thin films</subject><subject>Other nonelectronic physical properties</subject><subject>Physical properties of thin films, nonelectronic</subject><subject>Physics</subject><subject>Protective coatings</subject><subject>Spectroscopic ellipsometry</subject><subject>Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</subject><issn>0924-4247</issn><issn>1873-3069</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2002</creationdate><recordtype>article</recordtype><recordid>eNqFkEFv1DAQhS0EUpfCT6jkCwgOgXHsxM4JoYoWpEo9AGfLOGNqlNiLx6m0_x5vt4IjpznM92bee4xdCHgnQIzvv8LUq071Sr8B8RbAGN2JJ2wnjJadhHF6ynZ_kTP2nOgXAEip9Y6tt4nXO-T7kvdYakTiLs08bMnXmJNbYj3wHPi21OK6ehcTn6Nbc2MKLq7ifJRWbPQ9cp9djekn8Y3aorF5X6N3C6cDVVzpBXsW3EL48nGes-9Xn75dfu5ubq-_XH686bwcTe0cGtmbHwEnJQeNo1AtpvFq9MroyQdEUCBno4fZG6V1gKDAgJdGudEPozxnr093m7ffG1K1aySPy-IS5o1sr4fJTKpv4HACfclEBYPdl7i6crAC7LFc-1CuPTZnQdiHcq1oulePDxy1fKG45CP9E0s9NMdHIx9OHLa09xGLJR8xeZxjaZ3ZOcf_fPoDcxWPtA</recordid><startdate>20020430</startdate><enddate>20020430</enddate><creator>Gioti, M.</creator><creator>Logothetidis, S.</creator><creator>Charitidis, C.</creator><creator>Panayiotatos, Y.</creator><creator>Varsano, I.</creator><general>Elsevier B.V</general><general>Elsevier Science</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope></search><sort><creationdate>20020430</creationdate><title>On the properties and functionality of ultra-thin diamond related protective coatings used in optical systems</title><author>Gioti, M. ; Logothetidis, S. ; Charitidis, C. ; Panayiotatos, Y. ; Varsano, I.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c368t-ae8328bfe94357e6140168c46c4879cfee0403d875dc8477f0f4080c384a6c563</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2002</creationdate><topic>Antireflective coatings</topic><topic>Boron nitride films</topic><topic>Carbon-based films</topic><topic>Condensed matter: electronic structure, electrical, magnetic, and optical properties</topic><topic>Condensed matter: structure, mechanical and thermal properties</topic><topic>Exact sciences and technology</topic><topic>Insulators</topic><topic>Nanoindentation studies</topic><topic>Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation</topic><topic>Optical properties of specific thin films</topic><topic>Other nonelectronic physical properties</topic><topic>Physical properties of thin films, nonelectronic</topic><topic>Physics</topic><topic>Protective coatings</topic><topic>Spectroscopic ellipsometry</topic><topic>Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Gioti, M.</creatorcontrib><creatorcontrib>Logothetidis, S.</creatorcontrib><creatorcontrib>Charitidis, C.</creatorcontrib><creatorcontrib>Panayiotatos, Y.</creatorcontrib><creatorcontrib>Varsano, I.</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Sensors and actuators. A, Physical</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Gioti, M.</au><au>Logothetidis, S.</au><au>Charitidis, C.</au><au>Panayiotatos, Y.</au><au>Varsano, I.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>On the properties and functionality of ultra-thin diamond related protective coatings used in optical systems</atitle><jtitle>Sensors and actuators. A, Physical</jtitle><date>2002-04-30</date><risdate>2002</risdate><volume>99</volume><issue>1</issue><spage>35</spage><epage>40</epage><pages>35-40</pages><issn>0924-4247</issn><eissn>1873-3069</eissn><abstract>In this work we investigate the applicability of sputtered developed films belonging to diamond related materials, like amorphous carbon (a-C), carbon nitride (CN
x
), and boron nitride (BN
x
) films, as protective overcoatings of optical systems. Their suitability is defined by the combination of optical transparency (low absorption in the VIS energy region) with the high hardness and wear resistant character of the coating. The optical systems of our interest are electron-beam evaporated TiO
2/SiO
2 multi-layered coatings grown on polymeric substrates, which exhibit the optimum antireflective (AR) optical behavior but low wear durability and hardness. Within this research frame it was found a considerable enhancement of hardness of the AR optical coatings, which were studied by nanoindentation measurements, when an ultra-thin (∼100
Å) protective coating either of a-C, CN
x
or BN
x
is grown on top of them. In order to define which coating is the most proper one for such applications we extensively studied by spectroscopic ellipsometry the dielectric response and the optical properties of the developed films, as well as the combined reflectivity and optical response of the complete systems (AR/protective coatings).</abstract><cop>Lausanne</cop><pub>Elsevier B.V</pub><doi>10.1016/S0924-4247(01)00887-1</doi><tpages>6</tpages></addata></record> |
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| identifier | ISSN: 0924-4247 |
| ispartof | Sensors and actuators. A, Physical, 2002-04, Vol.99 (1), p.35-40 |
| issn | 0924-4247 1873-3069 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_27598942 |
| source | Elsevier ScienceDirect Journals |
| subjects | Antireflective coatings Boron nitride films Carbon-based films Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Insulators Nanoindentation studies Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of specific thin films Other nonelectronic physical properties Physical properties of thin films, nonelectronic Physics Protective coatings Spectroscopic ellipsometry Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) |
| title | On the properties and functionality of ultra-thin diamond related protective coatings used in optical systems |
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