Anomalous depth distribution of Fe and Co atoms in polyimide implanted to high fluence

Polyimide foils were implanted with 40 keV Fe + and Co + ions to the fluences of 2.5×10 16–1.25×10 17 cm −2 at ion current densities of 4, 8 and 12 μA/cm 2. Structural and composition alterations of the implanted polymer are studied using transmission electron microscopy and Rutherford back-scatteri...

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Veröffentlicht in:	Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2002-05, Vol.191 (1), p.695-699
Hauptverfasser:	Popok, V.N., Khaibullin, R.I., Bazarov, V.V., Valeev, V.F., Hnatowicz, V., Mackova, A., Odzhaev, V.B.
Format:	Artikel
Sprache:	eng
Schlagworte:	Depth profiles Ion implantation Polyimide Structural and composition changes
Online-Zugang:	Volltext
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