Anomalous depth distribution of Fe and Co atoms in polyimide implanted to high fluence
Polyimide foils were implanted with 40 keV Fe + and Co + ions to the fluences of 2.5×10 16–1.25×10 17 cm −2 at ion current densities of 4, 8 and 12 μA/cm 2. Structural and composition alterations of the implanted polymer are studied using transmission electron microscopy and Rutherford back-scatteri...
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| Veröffentlicht in: | Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2002-05, Vol.191 (1), p.695-699 |
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| container_title | Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms |
| container_volume | 191 |
| creator | Popok, V.N. Khaibullin, R.I. Bazarov, V.V. Valeev, V.F. Hnatowicz, V. Mackova, A. Odzhaev, V.B. |
| description | Polyimide foils were implanted with 40 keV Fe
+ and Co
+ ions to the fluences of 2.5×10
16–1.25×10
17 cm
−2 at ion current densities of 4, 8 and 12 μA/cm
2. Structural and composition alterations of the implanted polymer are studied using transmission electron microscopy and Rutherford back-scattering methods. Ion implantation results in formation of the near-surface carbonaceous layer filled up to 25 at.% of the embedded metal. Anomalous depth profiles of the metals, consisting of a strong near-surface peak and two weaker ones beyond the implanted layer, are observed. Possible mechanisms of the metal redistribution are discussed. |
| doi_str_mv | 10.1016/S0168-583X(02)00635-3 |
| format | Article |
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+ and Co
+ ions to the fluences of 2.5×10
16–1.25×10
17 cm
−2 at ion current densities of 4, 8 and 12 μA/cm
2. Structural and composition alterations of the implanted polymer are studied using transmission electron microscopy and Rutherford back-scattering methods. Ion implantation results in formation of the near-surface carbonaceous layer filled up to 25 at.% of the embedded metal. Anomalous depth profiles of the metals, consisting of a strong near-surface peak and two weaker ones beyond the implanted layer, are observed. Possible mechanisms of the metal redistribution are discussed.</description><identifier>ISSN: 0168-583X</identifier><identifier>EISSN: 1872-9584</identifier><identifier>DOI: 10.1016/S0168-583X(02)00635-3</identifier><language>eng</language><publisher>Elsevier B.V</publisher><subject>Depth profiles ; Ion implantation ; Polyimide ; Structural and composition changes</subject><ispartof>Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 2002-05, Vol.191 (1), p.695-699</ispartof><rights>2002 Elsevier Science B.V.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c338t-d0ccc43a0ec65e0fd2ed77b2ae0df8c5187301fd82375e4fd9c26659b6d631213</citedby><cites>FETCH-LOGICAL-c338t-d0ccc43a0ec65e0fd2ed77b2ae0df8c5187301fd82375e4fd9c26659b6d631213</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/S0168-583X(02)00635-3$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>314,780,784,3550,27924,27925,45995</link.rule.ids></links><search><creatorcontrib>Popok, V.N.</creatorcontrib><creatorcontrib>Khaibullin, R.I.</creatorcontrib><creatorcontrib>Bazarov, V.V.</creatorcontrib><creatorcontrib>Valeev, V.F.</creatorcontrib><creatorcontrib>Hnatowicz, V.</creatorcontrib><creatorcontrib>Mackova, A.</creatorcontrib><creatorcontrib>Odzhaev, V.B.</creatorcontrib><title>Anomalous depth distribution of Fe and Co atoms in polyimide implanted to high fluence</title><title>Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms</title><description>Polyimide foils were implanted with 40 keV Fe
+ and Co
+ ions to the fluences of 2.5×10
16–1.25×10
17 cm
−2 at ion current densities of 4, 8 and 12 μA/cm
2. Structural and composition alterations of the implanted polymer are studied using transmission electron microscopy and Rutherford back-scattering methods. Ion implantation results in formation of the near-surface carbonaceous layer filled up to 25 at.% of the embedded metal. Anomalous depth profiles of the metals, consisting of a strong near-surface peak and two weaker ones beyond the implanted layer, are observed. Possible mechanisms of the metal redistribution are discussed.</description><subject>Depth profiles</subject><subject>Ion implantation</subject><subject>Polyimide</subject><subject>Structural and composition changes</subject><issn>0168-583X</issn><issn>1872-9584</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2002</creationdate><recordtype>article</recordtype><recordid>eNqFkEtLAzEUhYMoWKs_QchKdDGaRzMzXUkpVoWCCx-4C2lyYyMzkzHJCP33pq249S7u3ZxzuOdD6JySa0poefOcV12Imr9fEnZFSMlFwQ_QiNYVK6ainhyi0Z_kGJ3E-EnyCC5G6G3W-VY1fojYQJ_W2LiYglsNyfkOe4sXgFVn8NxjlXwbsetw75uNa50B7Nq-UV0Cg5PHa_exxrYZoNNwio6saiKc_d4xel3cvcwfiuXT_eN8tiw053UqDNFaT7gioEsBxBoGpqpWTAExttYiN-CEWlMzXgmYWDPVrCzFdFWaklNG-Rhd7HP74L8GiEm2Lmpo8leQO0lWiVpQMs1CsRfq4GMMYGUfXKvCRlIitxTljqLcIpKEyR1FybPvdu-D3OLbQZBRu21D4wLoJI13_yT8AEh6eqc</recordid><startdate>20020501</startdate><enddate>20020501</enddate><creator>Popok, V.N.</creator><creator>Khaibullin, R.I.</creator><creator>Bazarov, V.V.</creator><creator>Valeev, V.F.</creator><creator>Hnatowicz, V.</creator><creator>Mackova, A.</creator><creator>Odzhaev, V.B.</creator><general>Elsevier B.V</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>8FD</scope><scope>JG9</scope></search><sort><creationdate>20020501</creationdate><title>Anomalous depth distribution of Fe and Co atoms in polyimide implanted to high fluence</title><author>Popok, V.N. ; Khaibullin, R.I. ; Bazarov, V.V. ; Valeev, V.F. ; Hnatowicz, V. ; Mackova, A. ; Odzhaev, V.B.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c338t-d0ccc43a0ec65e0fd2ed77b2ae0df8c5187301fd82375e4fd9c26659b6d631213</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2002</creationdate><topic>Depth profiles</topic><topic>Ion implantation</topic><topic>Polyimide</topic><topic>Structural and composition changes</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Popok, V.N.</creatorcontrib><creatorcontrib>Khaibullin, R.I.</creatorcontrib><creatorcontrib>Bazarov, V.V.</creatorcontrib><creatorcontrib>Valeev, V.F.</creatorcontrib><creatorcontrib>Hnatowicz, V.</creatorcontrib><creatorcontrib>Mackova, A.</creatorcontrib><creatorcontrib>Odzhaev, V.B.</creatorcontrib><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><jtitle>Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Popok, V.N.</au><au>Khaibullin, R.I.</au><au>Bazarov, V.V.</au><au>Valeev, V.F.</au><au>Hnatowicz, V.</au><au>Mackova, A.</au><au>Odzhaev, V.B.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Anomalous depth distribution of Fe and Co atoms in polyimide implanted to high fluence</atitle><jtitle>Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms</jtitle><date>2002-05-01</date><risdate>2002</risdate><volume>191</volume><issue>1</issue><spage>695</spage><epage>699</epage><pages>695-699</pages><issn>0168-583X</issn><eissn>1872-9584</eissn><abstract>Polyimide foils were implanted with 40 keV Fe
+ and Co
+ ions to the fluences of 2.5×10
16–1.25×10
17 cm
−2 at ion current densities of 4, 8 and 12 μA/cm
2. Structural and composition alterations of the implanted polymer are studied using transmission electron microscopy and Rutherford back-scattering methods. Ion implantation results in formation of the near-surface carbonaceous layer filled up to 25 at.% of the embedded metal. Anomalous depth profiles of the metals, consisting of a strong near-surface peak and two weaker ones beyond the implanted layer, are observed. Possible mechanisms of the metal redistribution are discussed.</abstract><pub>Elsevier B.V</pub><doi>10.1016/S0168-583X(02)00635-3</doi><tpages>5</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0168-583X |
| ispartof | Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 2002-05, Vol.191 (1), p.695-699 |
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| language | eng |
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| source | ScienceDirect Journals (5 years ago - present) |
| subjects | Depth profiles Ion implantation Polyimide Structural and composition changes |
| title | Anomalous depth distribution of Fe and Co atoms in polyimide implanted to high fluence |
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