Aluminium deposition on SF sub 6 plasma-treated polycarbonate: an AFM, XPS and mass spectroscopy study

A systematic investigation was made of the chemical and morphological influences of SF sub 6 plasma on polycarbonate and the influence of plasma treatment on Al metallization. Mass and ion spectroscopy were used for characterization of the plasma and the etching process. X-ray photoelectron spectros...

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Veröffentlicht in:	Surface and interface analysis 1998-04, Vol.26 (4), p.306-315
Hauptverfasser:	Seidel, C, Gotsmann, B, Kopf, H, Reihs, K, Fuchs, H
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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