High dielectric constant of SrTiO3 thin films prepared by chemical process

SrTiO3 thin films were prepared by the polymeric precursor method and deposited by spin-coating onto Pt/Ti/SiO2/Si(100) substrates. The spin-coated films heat treated at 700°C were crack-free, dense, and homogeneous. Microstructural and morphological evaluations were followed by grazing incident X-r...

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Veröffentlicht in:	Journal of materials science 2000-10, Vol.35 (19), p.4783-4787
Hauptverfasser:	PONTES, F. M, LEE, E. J. H, LEITE, E. R, LONGO, E, VARELA, J. A
Format:	Artikel
Sprache:	eng
Schlagworte:	Atomic force microscopy Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology Dielectric thin films Dielectrics, piezoelectrics, and ferroelectrics and their properties Dissipation factor Exact sciences and technology Heat treatment Materials science Methods of deposition of films and coatings film growth and epitaxy Microscopy Organic chemistry Permittivity Physics Prepolymers Scanning electron microscopy Silicon dioxide Silicon substrates Spin coating Strontium titanates Thin films
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