High dielectric constant of SrTiO3 thin films prepared by chemical process
SrTiO3 thin films were prepared by the polymeric precursor method and deposited by spin-coating onto Pt/Ti/SiO2/Si(100) substrates. The spin-coated films heat treated at 700°C were crack-free, dense, and homogeneous. Microstructural and morphological evaluations were followed by grazing incident X-r...
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| Veröffentlicht in: | Journal of materials science 2000-10, Vol.35 (19), p.4783-4787 |
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| container_issue | 19 |
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| container_title | Journal of materials science |
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| creator | PONTES, F. M LEE, E. J. H LEITE, E. R LONGO, E VARELA, J. A |
| description | SrTiO3 thin films were prepared by the polymeric precursor method and deposited by spin-coating onto Pt/Ti/SiO2/Si(100) substrates. The spin-coated films heat treated at 700°C were crack-free, dense, and homogeneous. Microstructural and morphological evaluations were followed by grazing incident X-ray, scanning electron microscopy and atomic force microscopy. Dielectric studies indicated a dielectric constant of about 475, which is higher than that of ceramic SrTiO3, and a factor dissipation of about 0.050 at 100 kHz. SrTiO3 thin films were found to have paraelectric properties with C-V characteristics. |
| doi_str_mv | 10.1023/A:1004816611050 |
| format | Article |
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M ; LEE, E. J. H ; LEITE, E. R ; LONGO, E ; VARELA, J. A</creator><contributor>WCA</contributor><creatorcontrib>PONTES, F. M ; LEE, E. J. H ; LEITE, E. R ; LONGO, E ; VARELA, J. A ; WCA</creatorcontrib><description>SrTiO3 thin films were prepared by the polymeric precursor method and deposited by spin-coating onto Pt/Ti/SiO2/Si(100) substrates. The spin-coated films heat treated at 700°C were crack-free, dense, and homogeneous. Microstructural and morphological evaluations were followed by grazing incident X-ray, scanning electron microscopy and atomic force microscopy. Dielectric studies indicated a dielectric constant of about 475, which is higher than that of ceramic SrTiO3, and a factor dissipation of about 0.050 at 100 kHz. 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| subjects | Atomic force microscopy Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology Dielectric thin films Dielectrics, piezoelectrics, and ferroelectrics and their properties Dissipation factor Exact sciences and technology Heat treatment Materials science Methods of deposition of films and coatings film growth and epitaxy Microscopy Organic chemistry Permittivity Physics Prepolymers Scanning electron microscopy Silicon dioxide Silicon substrates Spin coating Strontium titanates Thin films |
| title | High dielectric constant of SrTiO3 thin films prepared by chemical process |
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