Formation of recoil atoms and layer-by-layer sputtering of the single crystal surface under ion bombardment at grazing angles
Formation of recoil atoms on a single crystal surface under low energy ion bombardment at grazing angles has been investigated by a computer simulation method. The yields of the primary knocked out recoil atoms and their energies, as well as the relationship of the number of formed recoil atoms with...
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| Veröffentlicht in: | Applied surface science 1998-02, Vol.125 (2), p.221-226 |
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| container_title | Applied surface science |
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| creator | Umarov, F.F. Dzhurakhalov, A.A. Teshabaeva, N.A. |
| description | Formation of recoil atoms on a single crystal surface under low energy ion bombardment at grazing angles has been investigated by a computer simulation method. The yields of the primary knocked out recoil atoms and their energies, as well as the relationship of the number of formed recoil atoms with the impact points of ions and peculiarities of ion trajectories were determined. The mechanism of layer-by-layer sputtering of a surface at bombardment under grazing angles has been proposed. The possibility of application of such sputtering for single crystal layer-by-layer analysis with high sensitivity was shown. |
| doi_str_mv | 10.1016/S0169-4332(97)00397-8 |
| format | Article |
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| ispartof | Applied surface science, 1998-02, Vol.125 (2), p.221-226 |
| issn | 0169-4332 1873-5584 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_27540843 |
| source | Elsevier ScienceDirect Journals |
| subjects | Atomic, molecular, and ion beam impact and interactions with surfaces Condensed matter: electronic structure, electrical, magnetic, and optical properties Electron and ion emission by liquids and solids impact phenomena Exact sciences and technology Impact phenomena (including electron spectra and sputtering) Physics |
| title | Formation of recoil atoms and layer-by-layer sputtering of the single crystal surface under ion bombardment at grazing angles |
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