Effect of macrostructure and composition of the top metal electrode on properties of MIS gas sensors

Pd and Pd/Cu gate MIS gas sensitive structures are studied by the high-frequency CV method. The loss of the gas sensitivity due to interaction of the top electrode with the environment are characterised by Auger spectroscopy and scanning electron microscopy. Pd/Cu structures are more sensitive to th...

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Veröffentlicht in:	Microelectronics and reliability 2000-04, Vol.40 (4-5), p.821-824
Hauptverfasser:	Litovchenko, V.G, Gorbanyuk, T.I, Efremov, A.A, Evtukh, A.A
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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