EFFECTS OF Pt/SrRuO3 TOP ELECTRODES ON FERROELECTRIC PROPERTIES OF EPITAXIAL (Pb, La)(Zr, Ti)O3 THIN FILMS

Epitaxially c-axis oriented PLZT films with the composition (Pb0.925La0.075)(Zr0.4Ti0.6)O3 were deposited on Pt/MgO(100) substrate by rf-magnetron sputtering using a compacted powder target with the composition (0.8PLZT+0.2PbO). Pt/SrRuO3(SRO)/PLZT/Pt capacitors were fabricated by forming Pt/SRO top...

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Veröffentlicht in:	Jpn.J.Appl.Phys ,Part 1. Vol. 39, no. 9B, pp. 5451-5455. 2000 Part 1. Vol. 39, no. 9B, pp. 5451-5455. 2000, 2000, Vol.39 (9B), p.5451-5455
Hauptverfasser:	Kobune, M, Matsuura, O, Matsuzaki, T, Mineshige, A, Fujii, S, Fujisawa, H
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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