EFFECTS OF Pt/SrRuO3 TOP ELECTRODES ON FERROELECTRIC PROPERTIES OF EPITAXIAL (Pb, La)(Zr, Ti)O3 THIN FILMS

EFFECTS OF Pt/SrRuO3 TOP ELECTRODES ON FERROELECTRIC PROPERTIES OF EPITAXIAL (Pb, La)(Zr, Ti)O3 THIN FILMS

Epitaxially c-axis oriented PLZT films with the composition (Pb0.925La0.075)(Zr0.4Ti0.6)O3 were deposited on Pt/MgO(100) substrate by rf-magnetron sputtering using a compacted powder target with the composition (0.8PLZT+0.2PbO). Pt/SrRuO3(SRO)/PLZT/Pt capacitors were fabricated by forming Pt/SRO top...

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Veröffentlicht in:Jpn.J.Appl.Phys ,Part 1. Vol. 39, no. 9B, pp. 5451-5455. 2000 Part 1. Vol. 39, no. 9B, pp. 5451-5455. 2000, 2000, Vol.39 (9B), p.5451-5455
Hauptverfasser: Kobune, M, Matsuura, O, Matsuzaki, T, Mineshige, A, Fujii, S, Fujisawa, H
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container_title Jpn.J.Appl.Phys ,Part 1. Vol. 39, no. 9B, pp. 5451-5455. 2000
container_volume 39
creator Kobune, M
Matsuura, O
Matsuzaki, T
Mineshige, A
Fujii, S
Fujisawa, H
description Epitaxially c-axis oriented PLZT films with the composition (Pb0.925La0.075)(Zr0.4Ti0.6)O3 were deposited on Pt/MgO(100) substrate by rf-magnetron sputtering using a compacted powder target with the composition (0.8PLZT+0.2PbO). Pt/SrRuO3(SRO)/PLZT/Pt capacitors were fabricated by forming Pt/SRO top electrodes onto PLZT films. The 206-nm-thick PLZT films with layered Pt/SRO top electrodes exhibited a slightly high leakage current at a low electric field, compared with PLZT films with the same thickness and a single Pt top electrode. The values of switchable polarization after 1010 cycles for Pt/PLZT/Pt capacitors decreased up to around 17% of their initial values, whereas the switchable polarization for Pt/SRO/PLZT/Pt capacitors hardly exhibited any fatigue degradation due to polarization reversal. The layered Pt/SRO is useful as a top-electrode material for fabricating the low leakage and high endurance ferroelectric capacitors. 7 refs.
doi_str_mv 10.1143/JJAP.39.5451
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title EFFECTS OF Pt/SrRuO3 TOP ELECTRODES ON FERROELECTRIC PROPERTIES OF EPITAXIAL (Pb, La)(Zr, Ti)O3 THIN FILMS
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