Effects of composition variables on optical properties of sodium borosilicate glass films fabricated by aerosol flame deposition

Sodium borosilicate glass (SBSG) films were fabricated on silicon substrates as waveguide layers of planar optical waveguide devices. The aerosol flame deposition (AFD) method was employed for this purpose. The effects of Al 2O 3 concentration and Na 2O/B 2O 3 ratio on phase separation behavior and...

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Veröffentlicht in:Journal of non-crystalline solids 2000, Vol.261 (1), p.79-86
Hauptverfasser: Chung, H.G, Lee, J.W, Lee, H.J, Moon, Jong H, Jang, Hyun M
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Sprache:eng
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