Adsorption of Atomic Hydrogen on Ag-Covered 6H-SiC(0001) Surface

We have investigated atomic hydrogen (H) adsorption on an Ag-covered 6H-SiC(0001) surface, using coaxial impact-collision ion-scattering spectroscopy (CAICISS) and time-of-flight elastic recoil detection analysis (TOF-ERDA). It has been revealed that the two-dimensional (2D) layer of Ag on the 6H-Si...

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Veröffentlicht in:Japanese Journal of Applied Physics 2000, Vol.39 (7S), p.4340-4342
Hauptverfasser: Fujino, Toshiaki, Fuse, Takashi, Ryu, Jeong-Tak, Inudzuka, Katsuhiko, Yamazaki, Yujin, Katayama, Mitsuhiro, Oura, Kenjiro
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Sprache:eng
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Zusammenfassung:We have investigated atomic hydrogen (H) adsorption on an Ag-covered 6H-SiC(0001) surface, using coaxial impact-collision ion-scattering spectroscopy (CAICISS) and time-of-flight elastic recoil detection analysis (TOF-ERDA). It has been revealed that the two-dimensional (2D) layer of Ag on the 6H-SiC(0001) surface is changed to three-dimensional (3D) islands by the adsorption of H on the surface. The 3D Ag islands have an Ag(111) crystalline structure. When this surface is annealed at 550°C, the 3D Ag islands do not revert to a 2D layer but desorb from the surface together with H.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.39.4340