Behavior of radio frequency PACVD bilayers (SiC/TiN) on steel

It was previously shown that SiC-based films deposited at 870 K on a 4135 steel substrate (SS) had promising properties: H≈30 GPa, E=270 GPa, evaluated adhesion: 30–40 J m −2. Nevertheless, the remaining challenge is to increase the layer/substrate mechanical stability. With this view, a TiN layer w...

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Veröffentlicht in:	Thin solid films 1998-07, Vol.324 (1), p.141-150
Hauptverfasser:	Andrieux, M, Ducarroir, M, Beauprez, E
Format:	Artikel
Sprache:	eng
Schlagworte:	Adhesion Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Mechanical and acoustical properties Mechanical and acoustical properties adhesion Physical properties of thin films, nonelectronic Physics Plasma processing and deposition Silicon carbide Solid surfaces and solid-solid interfaces Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Titanium nitride
Online-Zugang:	Volltext
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