Oil removal from metals by linear multi-orifice hollow cathode
A linear multi-orifice hollow cathode oxygen plasma source has been developed for oil removal from moving metal surfaces. The source is a linear set of plasma jets created at each orifice by a magnetically enhanced and directed d.c. hollow cathode discharge. Vacuum and electrical characteristics of...
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Veröffentlicht in: | Surface & coatings technology 1995-12, Vol.76-77 (1-3), p.738-743 |
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creator | BELKIND, A LI, H CLOW, H JANSEN, F |
description | A linear multi-orifice hollow cathode oxygen plasma source has been developed for oil removal from moving metal surfaces. The source is a linear set of plasma jets created at each orifice by a magnetically enhanced and directed d.c. hollow cathode discharge. Vacuum and electrical characteristics of the source are presented and discussed. Substantial reduction of carbon-containing contamination on a metal surface after exposure to the oxygen plasma is demonstrated by using in situ XPS. The surface cleanliness of a metal sheet is evaluated by the contact angle with water. This angle is desired to be 10 deg or less. The contact angle dependence on plasma dose density is described for plasma atmospheres of O sub 2 and O sub 2 +CF sub 4 and two different aluminium foil thicknesses. |
doi_str_mv | 10.1016/02578-9729(50)25057- |
format | Article |
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The source is a linear set of plasma jets created at each orifice by a magnetically enhanced and directed d.c. hollow cathode discharge. Vacuum and electrical characteristics of the source are presented and discussed. Substantial reduction of carbon-containing contamination on a metal surface after exposure to the oxygen plasma is demonstrated by using in situ XPS. The surface cleanliness of a metal sheet is evaluated by the contact angle with water. This angle is desired to be 10 deg or less. 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The source is a linear set of plasma jets created at each orifice by a magnetically enhanced and directed d.c. hollow cathode discharge. Vacuum and electrical characteristics of the source are presented and discussed. Substantial reduction of carbon-containing contamination on a metal surface after exposure to the oxygen plasma is demonstrated by using in situ XPS. The surface cleanliness of a metal sheet is evaluated by the contact angle with water. This angle is desired to be 10 deg or less. The contact angle dependence on plasma dose density is described for plasma atmospheres of O sub 2 and O sub 2 +CF sub 4 and two different aluminium foil thicknesses.</description><subject>Applied sciences</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Exact sciences and technology</subject><subject>Materials science</subject><subject>Metals. 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Metallurgy</topic><topic>Physics</topic><topic>Surface cleaning, etching, patterning</topic><topic>Surface treatments</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>BELKIND, A</creatorcontrib><creatorcontrib>LI, H</creatorcontrib><creatorcontrib>CLOW, H</creatorcontrib><creatorcontrib>JANSEN, F</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><jtitle>Surface & coatings technology</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>BELKIND, A</au><au>LI, H</au><au>CLOW, H</au><au>JANSEN, F</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Oil removal from metals by linear multi-orifice hollow cathode</atitle><jtitle>Surface & coatings technology</jtitle><date>1995-12-01</date><risdate>1995</risdate><volume>76-77</volume><issue>1-3</issue><spage>738</spage><epage>743</epage><pages>738-743</pages><issn>0257-8972</issn><eissn>1879-3347</eissn><coden>SCTEEJ</coden><abstract>A linear multi-orifice hollow cathode oxygen plasma source has been developed for oil removal from moving metal surfaces. The source is a linear set of plasma jets created at each orifice by a magnetically enhanced and directed d.c. hollow cathode discharge. Vacuum and electrical characteristics of the source are presented and discussed. Substantial reduction of carbon-containing contamination on a metal surface after exposure to the oxygen plasma is demonstrated by using in situ XPS. The surface cleanliness of a metal sheet is evaluated by the contact angle with water. This angle is desired to be 10 deg or less. The contact angle dependence on plasma dose density is described for plasma atmospheres of O sub 2 and O sub 2 +CF sub 4 and two different aluminium foil thicknesses.</abstract><cop>Lausanne</cop><pub>Elsevier</pub><doi>10.1016/02578-9729(50)25057-</doi><tpages>6</tpages></addata></record> |
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subjects | Applied sciences Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Metals. Metallurgy Physics Surface cleaning, etching, patterning Surface treatments |
title | Oil removal from metals by linear multi-orifice hollow cathode |
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