Preparation of Hard Carbon Nitride Thin Films by Shielded Arc Ion Plating

The recent calculation suggested the existence of covalent type C-N compounds such as beta -C sub 3 N sub 4 and sphalerite type C sub 3 N sub 4 as super hardness materials and it has promoted investigations of carbon nitride thin films. The hard amorphous carbon nitride films was prepared by the mod...

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Veröffentlicht in:	Hyōmen gijutsu 1997/03/01, Vol.48(3), pp.362-363
Hauptverfasser:	TAKI, Yusuke, KITAGAWA, Toshihisa, TAKAI, Osamu
Format:	Artikel
Sprache:	eng ; jpn
Schlagworte:	Carbon Nitride Hardness Raman Shielded Cathodic Arc XPS
Online-Zugang:	Volltext
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