Effect of sidewall roughness on the diffraction efficiency of EUV high aspect ratio freestanding transmission gratings

Manufacturing-induced sidewall roughness has a significant impact on the diffraction efficiency of extreme ultraviolet (EUV) gratings and masks, which could be evaluated by a Debye-Waller damping factor. The rough profile models of line structures are always parallel to the surface for the reflectiv...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Optics express 2022-10, Vol.30 (22), p.40413-40424
Hauptverfasser: Wu, Shan, Wang, Jinshi, Fang, Fengzhou
Format: Artikel
Sprache:eng
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page 40424
container_issue 22
container_start_page 40413
container_title Optics express
container_volume 30
creator Wu, Shan
Wang, Jinshi
Fang, Fengzhou
description Manufacturing-induced sidewall roughness has a significant impact on the diffraction efficiency of extreme ultraviolet (EUV) gratings and masks, which could be evaluated by a Debye-Waller damping factor. The rough profile models of line structures are always parallel to the surface for the reflective elements. In this manuscript, a model of rough lines along the thickness direction is established, which cannot be ignored for high aspect ratio transmission gratings. Numerical calculations are carried out using both a rigorous model and a Fraunhofer approximation model. The two models agree with each other on the low-order transmission efficiencies, and the fitted Debye-Waller factor indicates a larger roughness value than that of the model due to the absorption of EUV irradiation for 90° sidewall angle. When the sidewall angle is smaller than 88°, an extra degree of freedom is introduced to the traditional Debye-Waller factor-based formula. The +1-order transmission efficiency and absorptivity with smooth and rough sidewalls are also analyzed, as well as the effect of incidence angle, wavelength and grating thickness.
doi_str_mv 10.1364/OE.473602
format Article
fullrecord <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_2729520033</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>2729520033</sourcerecordid><originalsourceid>FETCH-LOGICAL-c227t-91c5d1370dca25da5530a525d1ec1b9a84d822afd87d801db931d937e2504efb3</originalsourceid><addsrcrecordid>eNpNkEtPwzAQhC0EEqVw4B_4CIcUP5I6PqIqPKRKvVCukWuvE6PUKd4UxL8nUTlw2lnpm9FoCLnlbMHlMn_YVItcySUTZ2TGmc6znJXq_J--JFeIH4zxXGk1I1-V92AH2nuKwcG36Tqa-mPTRkCkfaRDC9QF75OxQxh_8D7YANH-TJ5q-07b0LTU4GGKSWaEqE8AOJjoQmzokEzEfUCc3M0ExAavyYU3HcLN352T7VP1tnrJ1pvn19XjOrNCqCHT3BaOS8WcNaJwpigkM8WoOFi-06bMXSmE8a5UrmTc7bTkTksFomA5-J2ck7tT7iH1n8exVD02sdB1JkJ_xFoooQvBmJQjen9CbeoRE_j6kMLepJ-as3ratt5U9Wlb-QsZim3M</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2729520033</pqid></control><display><type>article</type><title>Effect of sidewall roughness on the diffraction efficiency of EUV high aspect ratio freestanding transmission gratings</title><source>DOAJ Directory of Open Access Journals</source><source>EZB-FREE-00999 freely available EZB journals</source><source>Alma/SFX Local Collection</source><creator>Wu, Shan ; Wang, Jinshi ; Fang, Fengzhou</creator><creatorcontrib>Wu, Shan ; Wang, Jinshi ; Fang, Fengzhou</creatorcontrib><description>Manufacturing-induced sidewall roughness has a significant impact on the diffraction efficiency of extreme ultraviolet (EUV) gratings and masks, which could be evaluated by a Debye-Waller damping factor. The rough profile models of line structures are always parallel to the surface for the reflective elements. In this manuscript, a model of rough lines along the thickness direction is established, which cannot be ignored for high aspect ratio transmission gratings. Numerical calculations are carried out using both a rigorous model and a Fraunhofer approximation model. The two models agree with each other on the low-order transmission efficiencies, and the fitted Debye-Waller factor indicates a larger roughness value than that of the model due to the absorption of EUV irradiation for 90° sidewall angle. When the sidewall angle is smaller than 88°, an extra degree of freedom is introduced to the traditional Debye-Waller factor-based formula. The +1-order transmission efficiency and absorptivity with smooth and rough sidewalls are also analyzed, as well as the effect of incidence angle, wavelength and grating thickness.</description><identifier>ISSN: 1094-4087</identifier><identifier>EISSN: 1094-4087</identifier><identifier>DOI: 10.1364/OE.473602</identifier><language>eng</language><ispartof>Optics express, 2022-10, Vol.30 (22), p.40413-40424</ispartof><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c227t-91c5d1370dca25da5530a525d1ec1b9a84d822afd87d801db931d937e2504efb3</citedby><cites>FETCH-LOGICAL-c227t-91c5d1370dca25da5530a525d1ec1b9a84d822afd87d801db931d937e2504efb3</cites><orcidid>0000-0002-8716-5988</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,860,27901,27902</link.rule.ids></links><search><creatorcontrib>Wu, Shan</creatorcontrib><creatorcontrib>Wang, Jinshi</creatorcontrib><creatorcontrib>Fang, Fengzhou</creatorcontrib><title>Effect of sidewall roughness on the diffraction efficiency of EUV high aspect ratio freestanding transmission gratings</title><title>Optics express</title><description>Manufacturing-induced sidewall roughness has a significant impact on the diffraction efficiency of extreme ultraviolet (EUV) gratings and masks, which could be evaluated by a Debye-Waller damping factor. The rough profile models of line structures are always parallel to the surface for the reflective elements. In this manuscript, a model of rough lines along the thickness direction is established, which cannot be ignored for high aspect ratio transmission gratings. Numerical calculations are carried out using both a rigorous model and a Fraunhofer approximation model. The two models agree with each other on the low-order transmission efficiencies, and the fitted Debye-Waller factor indicates a larger roughness value than that of the model due to the absorption of EUV irradiation for 90° sidewall angle. When the sidewall angle is smaller than 88°, an extra degree of freedom is introduced to the traditional Debye-Waller factor-based formula. The +1-order transmission efficiency and absorptivity with smooth and rough sidewalls are also analyzed, as well as the effect of incidence angle, wavelength and grating thickness.</description><issn>1094-4087</issn><issn>1094-4087</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2022</creationdate><recordtype>article</recordtype><recordid>eNpNkEtPwzAQhC0EEqVw4B_4CIcUP5I6PqIqPKRKvVCukWuvE6PUKd4UxL8nUTlw2lnpm9FoCLnlbMHlMn_YVItcySUTZ2TGmc6znJXq_J--JFeIH4zxXGk1I1-V92AH2nuKwcG36Tqa-mPTRkCkfaRDC9QF75OxQxh_8D7YANH-TJ5q-07b0LTU4GGKSWaEqE8AOJjoQmzokEzEfUCc3M0ExAavyYU3HcLN352T7VP1tnrJ1pvn19XjOrNCqCHT3BaOS8WcNaJwpigkM8WoOFi-06bMXSmE8a5UrmTc7bTkTksFomA5-J2ck7tT7iH1n8exVD02sdB1JkJ_xFoooQvBmJQjen9CbeoRE_j6kMLepJ-as3ratt5U9Wlb-QsZim3M</recordid><startdate>20221024</startdate><enddate>20221024</enddate><creator>Wu, Shan</creator><creator>Wang, Jinshi</creator><creator>Fang, Fengzhou</creator><scope>AAYXX</scope><scope>CITATION</scope><scope>7X8</scope><orcidid>https://orcid.org/0000-0002-8716-5988</orcidid></search><sort><creationdate>20221024</creationdate><title>Effect of sidewall roughness on the diffraction efficiency of EUV high aspect ratio freestanding transmission gratings</title><author>Wu, Shan ; Wang, Jinshi ; Fang, Fengzhou</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c227t-91c5d1370dca25da5530a525d1ec1b9a84d822afd87d801db931d937e2504efb3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2022</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Wu, Shan</creatorcontrib><creatorcontrib>Wang, Jinshi</creatorcontrib><creatorcontrib>Fang, Fengzhou</creatorcontrib><collection>CrossRef</collection><collection>MEDLINE - Academic</collection><jtitle>Optics express</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Wu, Shan</au><au>Wang, Jinshi</au><au>Fang, Fengzhou</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Effect of sidewall roughness on the diffraction efficiency of EUV high aspect ratio freestanding transmission gratings</atitle><jtitle>Optics express</jtitle><date>2022-10-24</date><risdate>2022</risdate><volume>30</volume><issue>22</issue><spage>40413</spage><epage>40424</epage><pages>40413-40424</pages><issn>1094-4087</issn><eissn>1094-4087</eissn><abstract>Manufacturing-induced sidewall roughness has a significant impact on the diffraction efficiency of extreme ultraviolet (EUV) gratings and masks, which could be evaluated by a Debye-Waller damping factor. The rough profile models of line structures are always parallel to the surface for the reflective elements. In this manuscript, a model of rough lines along the thickness direction is established, which cannot be ignored for high aspect ratio transmission gratings. Numerical calculations are carried out using both a rigorous model and a Fraunhofer approximation model. The two models agree with each other on the low-order transmission efficiencies, and the fitted Debye-Waller factor indicates a larger roughness value than that of the model due to the absorption of EUV irradiation for 90° sidewall angle. When the sidewall angle is smaller than 88°, an extra degree of freedom is introduced to the traditional Debye-Waller factor-based formula. The +1-order transmission efficiency and absorptivity with smooth and rough sidewalls are also analyzed, as well as the effect of incidence angle, wavelength and grating thickness.</abstract><doi>10.1364/OE.473602</doi><tpages>12</tpages><orcidid>https://orcid.org/0000-0002-8716-5988</orcidid><oa>free_for_read</oa></addata></record>
fulltext fulltext
identifier ISSN: 1094-4087
ispartof Optics express, 2022-10, Vol.30 (22), p.40413-40424
issn 1094-4087
1094-4087
language eng
recordid cdi_proquest_miscellaneous_2729520033
source DOAJ Directory of Open Access Journals; EZB-FREE-00999 freely available EZB journals; Alma/SFX Local Collection
title Effect of sidewall roughness on the diffraction efficiency of EUV high aspect ratio freestanding transmission gratings
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-30T02%3A00%3A30IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Effect%20of%20sidewall%20roughness%20on%20the%20diffraction%20efficiency%20of%20EUV%20high%20aspect%20ratio%20freestanding%20transmission%20gratings&rft.jtitle=Optics%20express&rft.au=Wu,%20Shan&rft.date=2022-10-24&rft.volume=30&rft.issue=22&rft.spage=40413&rft.epage=40424&rft.pages=40413-40424&rft.issn=1094-4087&rft.eissn=1094-4087&rft_id=info:doi/10.1364/OE.473602&rft_dat=%3Cproquest_cross%3E2729520033%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=2729520033&rft_id=info:pmid/&rfr_iscdi=true