Resolution-enhanced optical inspection system to examine metallic nanostructures using structured illumination

We developed a structured illumination-based optical inspection system to inspect metallic nanostructures in real time. To address this, we used post-image-processing techniques to enhance the image resolution. To examine the fabricated metallic nanostructures in real time, a compact and highly reso...

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Veröffentlicht in:	Applied optics (2004) 2022-08, Vol.61 (23), p.6819-6826
Hauptverfasser:	Yoon, Taerim, Kim, Pil Un, Ahn, Heesang, Kim, Taeyeon, Eom, Tae Joong, Kim, Kyujung, Choi, Jong-ryul
Format:	Artikel
Sprache:	eng
Schlagworte:	Illumination Image enhancement Image processing Image reconstruction Image resolution Industrial applications Inspection Nanostructure Real time
Online-Zugang:	Volltext
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