Grinding of silicon carbide for optical surface fabrication, Part 1: surface analysis

This paper presents a study of the grinding of three different grades of silicon carbide (SiC) under the same conditions. Surface topography is analyzed using coherent scanning interferometry and scanning electron microscopy. The study provides a baseline understanding of the process mechanics and t...

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Veröffentlicht in:	Applied optics (2004) 2022-05, Vol.61 (15), p.4579-4590
Hauptverfasser:	Shanmugam, Prithiviraj, Lambropoulos, John C., Davies, Matthew A
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical vapor deposition Damage assessment Grinding wheels Machining Optics Polishing Process parameters Rapid prototyping Silicon carbide Surface analysis (chemical) Surface finish Surface roughness
Online-Zugang:	Volltext
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