Optimizing energy dispersive X-Ray Spectroscopy (EDS) image fusion to Scanning Electron Microscopy (SEM) images

Fusion and quality enhancement of the low-resolution Energy Dispersive X-ray Spectroscopy (EDS) maps to Scanning Electron Microscopy (SEM) panchromatic images has been proven effective by various pansharpening algorithms. The present paper aims to target the preprocessing of these maps to enhance th...

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Veröffentlicht in:	Micron (Oxford, England : 1993) England : 1993), 2022-12, Vol.163, p.103361-103361, Article 103361
Hauptverfasser:	Duma, Zina-Sabrina, Sihvonen, Tuomas, Havukainen, Jouni, Reinikainen, Ville, Reinikainen, Satu-Pia
Format:	Artikel
Sprache:	eng
Schlagworte:	electron microscopy Energy dispersive X-ray spectroscopy energy-dispersive X-ray analysis Image fusion Multivariate image processing Pansharpening Scanning electron microscopy wavelet
Online-Zugang:	Volltext
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