Measuring amplitude and phase distribution of fields generated by gratings with sub-wavelength resolution
In this paper, we intend to gain an understanding of the interaction of light with microstructures. Measurements of amplitude and phase in the diffracted field close to gratings using a heterodyne scanning probe are presented. Coherent light diffracted by microstructures produces periodic features a...
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Veröffentlicht in: | Optics communications 2002-05, Vol.205 (4), p.229-238 |
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Sprache: | eng |
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