Excimer laser ablation of polycarbonate-based plastic substrates

Ablation of polycarbonate-based plastics under excimer laser irradiation has been studied, with emphasis on the influence of specific inorganic additives in the polymer to the ablation process. Such additives consisted of 0.2 μm sized, (spherical) TiO 2 grains, in either 5% or 10% mass concentration...

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Veröffentlicht in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 1999-05, Vol.151 (1), p.263-267
Hauptverfasser: Devalckenaere, M., Jadin, A., Kolev, K., Laude, L.D.
Format: Artikel
Sprache:eng
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