Transparent conductive ITO thin films through the sol-gel process using metal salts

The electrical and optical properties, structure and morphology of ITO thin films were investigated. Ten percent by weight Sn-doped indium oxide (ITO) films were prepared on soda-lime-silicate glass substrate by the sol-gel spin coating method using inorganic metal salts. All layers studied with a t...

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Veröffentlicht in:	Thin solid films 1999-06, Vol.347 (1), p.155-160
Hauptverfasser:	Kim, Seon-Soon, Choi, Se-Young, Park, Chan-Gyung, Jin, Hyeon-Woo
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Electrical and optical properties Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Electronic transport phenomena in thin films and low-dimensional structures Exact sciences and technology Indium tin oxide (ITO) Liquid phase epitaxy deposition from liquid phases (melts, solutions, and surface layers on liquids) Low-field transport and mobility piezoresistance Materials science Methods of deposition of films and coatings film growth and epitaxy Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Other nonmetallic inorganics Other nonmetals Physics Sol-gel Structure and morphology Structure and morphology thickness Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology Visible and ultraviolet spectra
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