Thin film TiC/TaC thermocouples

TiC and TaC thin films were investigated, for the first time, for thin film thermocouple applications. Thin films of TaC and TiC were deposited on electronic grade alumina substrates using the r.f. sputter deposition technique. Sheet resistance of the thin films was measured using a four point probe...

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Veröffentlicht in:	Thin solid films 1999-03, Vol.342 (1-2), p.214-220
Hauptverfasser:	BHATT, H. D, VEDULA, R, DESU, S. B, FRALICK, G. C
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Thermoelectric, pyroelectric devices, etc
Online-Zugang:	Volltext
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