Humidity sensing behaviors of nanocrystalline Al-doped ZnO thin films prepared by sol-gel process

Nanocrystalline Al-doped ZnO(AZO) thin films prepared by sol-gel method were used for studying the variation of resistance with humidity. The particle size of the films exhibits nanometer order with zincite structure and the thickness of the films increases linearly with the number of coatings. The...

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Veröffentlicht in:	Journal of materials science. Materials in electronics 2002-07, Vol.13 (7), p.391-394
Hauptverfasser:	TAI, Weon-Pil, OH, Jae-Hee
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum Condensed matter: electronic structure, electrical, magnetic, and optical properties Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Electronic transport phenomena in thin films and low-dimensional structures Electronics Exact sciences and technology General equipment and techniques Humidity Hygrometers Instruments, apparatus, components and techniques common to several branches of physics and astronomy Low-field transport and mobility piezoresistance Nanocrystals Nanostructure Physics Relative humidity Sol gel process Thin films
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