Humidity sensing behaviors of nanocrystalline Al-doped ZnO thin films prepared by sol-gel process
Nanocrystalline Al-doped ZnO(AZO) thin films prepared by sol-gel method were used for studying the variation of resistance with humidity. The particle size of the films exhibits nanometer order with zincite structure and the thickness of the films increases linearly with the number of coatings. The...
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| Veröffentlicht in: | Journal of materials science. Materials in electronics 2002-07, Vol.13 (7), p.391-394 |
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| container_title | Journal of materials science. Materials in electronics |
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| creator | TAI, Weon-Pil OH, Jae-Hee |
| description | Nanocrystalline Al-doped ZnO(AZO) thin films prepared by sol-gel method were used for studying the variation of resistance with humidity. The particle size of the films exhibits nanometer order with zincite structure and the thickness of the films increases linearly with the number of coatings. The AZO film coated five times and annealed at 500 °C exhibits the highest sensitivity for the humidity, which shows three order change in the resistance during the relative humidity variation from 20 to 90%. It is considered that the high humidity sensitivity is due to proton hopping between water molecules adsorbed on the film surfaces with capillary nanopores.[PUBLICATION ABSTRACT] |
| doi_str_mv | 10.1023/A:1016084309094 |
| format | Article |
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The particle size of the films exhibits nanometer order with zincite structure and the thickness of the films increases linearly with the number of coatings. The AZO film coated five times and annealed at 500 °C exhibits the highest sensitivity for the humidity, which shows three order change in the resistance during the relative humidity variation from 20 to 90%. It is considered that the high humidity sensitivity is due to proton hopping between water molecules adsorbed on the film surfaces with capillary nanopores.[PUBLICATION ABSTRACT]</description><identifier>ISSN: 0957-4522</identifier><identifier>EISSN: 1573-482X</identifier><identifier>DOI: 10.1023/A:1016084309094</identifier><language>eng</language><publisher>Norwell, MA: Springer</publisher><subject>Aluminum ; Condensed matter: electronic structure, electrical, magnetic, and optical properties ; Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures ; Electronic transport phenomena in thin films and low-dimensional structures ; Electronics ; Exact sciences and technology ; General equipment and techniques ; Humidity ; Hygrometers ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; Low-field transport and mobility; piezoresistance ; Nanocrystals ; Nanostructure ; Physics ; Relative humidity ; Sol gel process ; Thin films</subject><ispartof>Journal of materials science. 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Materials in electronics</title><description>Nanocrystalline Al-doped ZnO(AZO) thin films prepared by sol-gel method were used for studying the variation of resistance with humidity. The particle size of the films exhibits nanometer order with zincite structure and the thickness of the films increases linearly with the number of coatings. The AZO film coated five times and annealed at 500 °C exhibits the highest sensitivity for the humidity, which shows three order change in the resistance during the relative humidity variation from 20 to 90%. 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Materials in electronics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>TAI, Weon-Pil</au><au>OH, Jae-Hee</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Humidity sensing behaviors of nanocrystalline Al-doped ZnO thin films prepared by sol-gel process</atitle><jtitle>Journal of materials science. Materials in electronics</jtitle><date>2002-07-01</date><risdate>2002</risdate><volume>13</volume><issue>7</issue><spage>391</spage><epage>394</epage><pages>391-394</pages><issn>0957-4522</issn><eissn>1573-482X</eissn><abstract>Nanocrystalline Al-doped ZnO(AZO) thin films prepared by sol-gel method were used for studying the variation of resistance with humidity. The particle size of the films exhibits nanometer order with zincite structure and the thickness of the films increases linearly with the number of coatings. The AZO film coated five times and annealed at 500 °C exhibits the highest sensitivity for the humidity, which shows three order change in the resistance during the relative humidity variation from 20 to 90%. It is considered that the high humidity sensitivity is due to proton hopping between water molecules adsorbed on the film surfaces with capillary nanopores.[PUBLICATION ABSTRACT]</abstract><cop>Norwell, MA</cop><pub>Springer</pub><doi>10.1023/A:1016084309094</doi><tpages>4</tpages></addata></record> |
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| identifier | ISSN: 0957-4522 |
| ispartof | Journal of materials science. Materials in electronics, 2002-07, Vol.13 (7), p.391-394 |
| issn | 0957-4522 1573-482X |
| language | eng |
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| source | SpringerNature Journals |
| subjects | Aluminum Condensed matter: electronic structure, electrical, magnetic, and optical properties Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Electronic transport phenomena in thin films and low-dimensional structures Electronics Exact sciences and technology General equipment and techniques Humidity Hygrometers Instruments, apparatus, components and techniques common to several branches of physics and astronomy Low-field transport and mobility piezoresistance Nanocrystals Nanostructure Physics Relative humidity Sol gel process Thin films |
| title | Humidity sensing behaviors of nanocrystalline Al-doped ZnO thin films prepared by sol-gel process |
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