Growth and Characterization of Thick (100) CdTe Layers on (100) GaAs and (100) GaAs/Si Substrates by Metalorganic Vapor Phase Epitaxy
The growth characteristics and the crystalline quality of thick (approximately 100 mu m) (100) CdTe epitaxial layers grown on (100) GaAs and (100) GaAs/Si substrates in a MOVPE system for X-ray, gamma-ray detectors applications were investigated. The growth rate was constant up to the layer thicknes...
Gespeichert in:
Veröffentlicht in: | Japanese Journal of Applied Physics 2002-10, Vol.41 (Part 2, No. 10A), p.L1109-L1111 |
---|---|
Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Schreiben Sie den ersten Kommentar!