Fundamental understanding and implementation of Al-enhanced PECVD SiNx hydrogenation in silicon ribbons

A low-cost, manufacturable defect gettering and passivation treatment, involving simultaneous anneal of a PECVD SiNx film and a screen-printed Al layer, improves the lifetime in Si ribbon materials from 1-10 ms to over 20 ms. Results indicate that the optimum anneal temperature for SiNx-induced hydr...

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Veröffentlicht in:Solar energy materials and solar cells 2002-10, Vol.74 (1-4), p.117-126
Hauptverfasser: ROHATGI, A, YELUNDUR, V, JEONG, J, EBONG, A, ROSENBLUM, M. D, HANOKA, J. I
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container_end_page 126
container_issue 1-4
container_start_page 117
container_title Solar energy materials and solar cells
container_volume 74
creator ROHATGI, A
YELUNDUR, V
JEONG, J
EBONG, A
ROSENBLUM, M. D
HANOKA, J. I
description A low-cost, manufacturable defect gettering and passivation treatment, involving simultaneous anneal of a PECVD SiNx film and a screen-printed Al layer, improves the lifetime in Si ribbon materials from 1-10 ms to over 20 ms. Results indicate that the optimum anneal temperature for SiNx-induced hydrogenation is 700 C for EFG and increases to 825 C when Al is present on the back of the sample. This not only improves the degree of hydrogenation, but also forms an effective back surface field. Authors propose a three-step physical model, based on results, in which defect passivation is governed by the release of H from the SiNx film due to annealing, the generation of vacancies during Al-Si alloying, and the retention of H at defect sites due to rapid cooling. Controlled rapid cooling was implemented after the hydrogenation anneal to improve the retention of H at defect sites by incorporating an RTP contact firing scheme. RTP contact firing improved the performance of ribbon bsolar cells by 1.3-1.5% absolute when compared to slow, belt furnace contact firing. This enhancement was due to improved back surface recombination velocity, fill factor, and bulk lifetime. Enhanced hydrogenation and rapid heating and cooling resulted in screen-printed Si ribbon cell efficiencies approaching 15%. 9 refs.
doi_str_mv 10.1016/S0927-0248(02)00055-7
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source Elsevier ScienceDirect Journals Complete
subjects Applied sciences
Energy
Exact sciences and technology
Natural energy
Photovoltaic conversion
Solar cells. Photoelectrochemical cells
Solar energy
title Fundamental understanding and implementation of Al-enhanced PECVD SiNx hydrogenation in silicon ribbons
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