Sputtering mechanisms of polycrystalline platinum by low energy ions

Sputtering mechanisms of polycrystalline platinum by low energy ions

The results of an experimental study and a computer simulation with the TRIM.SP code of the angular distributions of atoms sputtered from polycrystalline platinum under 1.5–9 keV He+ bombardment at the normal ion incidence are presented. It has been found that angular distributions of sputtered atom...

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Veröffentlicht in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2000-02, Vol.160 (2), p.221-230
Hauptverfasser: Chernysh, V.S, Eckstein, W, Haidarov, A.A, Kulikauskas, V.S, Mashkova, E.S, Molchanov, V.A
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Sprache:eng
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Angular distributions
Ion bombardment
Sputtered flux
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container_title Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms
container_volume 160
creator Chernysh, V.S
Eckstein, W
Haidarov, A.A
Kulikauskas, V.S
Mashkova, E.S
Molchanov, V.A
description The results of an experimental study and a computer simulation with the TRIM.SP code of the angular distributions of atoms sputtered from polycrystalline platinum under 1.5–9 keV He+ bombardment at the normal ion incidence are presented. It has been found that angular distributions of sputtered atoms are overcosine and that their shape is practically independent of the bombarding ion species and ion energy. Good agreement between experimental results and computer simulation data was found. Computer simulations of the partial angular distributions of Pt atoms ejected due to various sputtering mechanisms for He and Ar bombardments were performed. The role of different mechanisms in the formation of angular distributions of sputtered atoms has been analyzed.
doi_str_mv 10.1016/S0168-583X(99)00591-1
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1872-9584
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source ScienceDirect Journals (5 years ago - present)
subjects Angular distributions
Ion bombardment
Sputtered flux
title Sputtering mechanisms of polycrystalline platinum by low energy ions
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