Applied high-current N-ion-beam surface engineering of metals and industrial tools at Chiang Mai University

A 150-kV, high-current, non-mass-analyzed ion implanter based on a modified duoplasmatron ion source and a completely computerized control has been developed for industrially applicable ion beam surface engineering at Chiang Mai University. High-current (approx =mA) N-ion implantation in steels and...

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Veröffentlicht in:	Surface & coatings technology 1999-09, Vol.131 (1-3), p.558-562
Hauptverfasser:	Yu, L D, Davydov, S, Yotsombat, B, Intarasiri, S, Thongleurm, C, Ano, V, Vilaithong, T, Rhodes, M W
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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