Bonding character of the boron-doped C60 films prepared by radio frequency plasma assisted vapor deposition

Boron-doped C60 thin films were synthesized firstly by a radio frequency plasma assisted vapor deposition technique using C60 as a precursor. The surface morphology of the samples was observed by atomic force microscopy, and their chemical bonding characters were investigated by x-ray photoelectron...

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Veröffentlicht in:Journal of materials science 2002-03, Vol.37 (5), p.1043-1047
Hauptverfasser: ZOU, Y. J, ZHANG, X. W, LI, Y. L, WANG, B, YAN, H, CUI, J. Z, LIU, L. M, DA, D. A
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container_end_page 1047
container_issue 5
container_start_page 1043
container_title Journal of materials science
container_volume 37
creator ZOU, Y. J
ZHANG, X. W
LI, Y. L
WANG, B
YAN, H
CUI, J. Z
LIU, L. M
DA, D. A
description Boron-doped C60 thin films were synthesized firstly by a radio frequency plasma assisted vapor deposition technique using C60 as a precursor. The surface morphology of the samples was observed by atomic force microscopy, and their chemical bonding characters were investigated by x-ray photoelectron spectroscopy (XPS) and Fourier transform infrared (FTIR) spectroscopy. The results show that the boron atoms are incorporated into the fullerene molecules in the samples, and the boron heterofullerene C60−nBn was synthesized. Plasma polymerized C60 molecules were also found in the samples besides the boron heterofullerene. The effects of radio frequency power and the substrate position on the growth of the B-doped C60 films were studied. The results indicate that the higher energies and densities of the reactive radicals in the plasma are favorable for the formation of the boron heterofullerene C60−nBn or polymerized C60 molecules.
doi_str_mv 10.1023/A:1014368418784
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subjects Atomic force microscopy
Boron
Buckminsterfullerene
Chemical bonds
Chemical synthesis
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Defects and impurities: doping, implantation, distribution, concentration, etc
Exact sciences and technology
Fourier transforms
Fullerenes
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Morphology
Organic chemistry
Photoelectrons
Physics
Polymerization
Radio frequency
Radio frequency plasma
Spectrum analysis
Structure and morphology
thickness
Substrates
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
Thin films
Vapor deposition
Vapor phase epitaxy
growth from vapor phase
X ray photoelectron spectroscopy
title Bonding character of the boron-doped C60 films prepared by radio frequency plasma assisted vapor deposition
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