Measuring thermal conductivity of CVD diamond and diamond-like films on silicon substrates by holographic interferometry

It is a great challenge to measure accurately the high values of thermal conductivity of diamond and diamond-like materials in the form of thin films. The objective of this study is to develop a technique based on the principle of holographic interferometry to determine these values relative to othe...

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Veröffentlicht in:	Diamond and related materials 1999-08, Vol.8 (8), p.1607-1610
Hauptverfasser:	Leung, K.M., Cheung, A.C., Liu, B.C., Woo, H.K., Sun, C., Shi, X.Q., Lee, S.T.
Format:	Artikel
Sprache:	eng
Schlagworte:	CVD diamond and diamond-like thin films Holographic interferometry Thermal conductivity Thermal diffusivity
Online-Zugang:	Volltext
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