MBE growth of HgCdTe on silicon substrates for large-area infrared focal plane arrays: A review of recent progress
We review the rapid progress that has been made during the past three years in the heteroepitaxial growth of HgCdTe infrared detector device structures on Si substrates by molecular-beam epitaxy. The evolution of this technology has enabled the fabrication of high performance, large-area HgCdTe infr...
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| Veröffentlicht in: | Journal of electronic materials 1999-06, Vol.28 (6), p.705-711 |
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| container_title | Journal of electronic materials |
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| creator | de Lyon, T. J. Jensen, J. E. Gorwitz, M. D. Cockrum, C. A. Johnson, S. M. Venzor, G. M. |
| description | We review the rapid progress that has been made during the past three years in the heteroepitaxial growth of HgCdTe infrared detector device structures on Si substrates by molecular-beam epitaxy. The evolution of this technology has enabled the fabrication of high performance, large-area HgCdTe infrared focal-plane arrays on Si substrates. A key element of this heteroepitaxial approach has been development of high quality CdTe buffer layers deposited on Si(112) substrates. We review the solutions developed by several groups to address the difficulties associated with the CdTe/Si(112) heteroepitaxial system, including control of crystallographic orientation and minimization of defects such as twins and threading dislocations. The material quality of HgCdTe/Si and the performance of HgCdTe detector structures grown on CdTe/Si(112) composite substrates is reviewed. Finally, we discuss some of the challenges related to composition uniformity and defect generation encountered with scaling the MBE growth process for HgCdTe to large-area Si substrates. |
| doi_str_mv | 10.1007/s11664-999-0058-2 |
| format | Article |
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J. ; Jensen, J. E. ; Gorwitz, M. D. ; Cockrum, C. A. ; Johnson, S. M. ; Venzor, G. M.</creator><creatorcontrib>de Lyon, T. J. ; Jensen, J. E. ; Gorwitz, M. D. ; Cockrum, C. A. ; Johnson, S. M. ; Venzor, G. M.</creatorcontrib><description>We review the rapid progress that has been made during the past three years in the heteroepitaxial growth of HgCdTe infrared detector device structures on Si substrates by molecular-beam epitaxy. The evolution of this technology has enabled the fabrication of high performance, large-area HgCdTe infrared focal-plane arrays on Si substrates. A key element of this heteroepitaxial approach has been development of high quality CdTe buffer layers deposited on Si(112) substrates. We review the solutions developed by several groups to address the difficulties associated with the CdTe/Si(112) heteroepitaxial system, including control of crystallographic orientation and minimization of defects such as twins and threading dislocations. The material quality of HgCdTe/Si and the performance of HgCdTe detector structures grown on CdTe/Si(112) composite substrates is reviewed. 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We review the solutions developed by several groups to address the difficulties associated with the CdTe/Si(112) heteroepitaxial system, including control of crystallographic orientation and minimization of defects such as twins and threading dislocations. The material quality of HgCdTe/Si and the performance of HgCdTe detector structures grown on CdTe/Si(112) composite substrates is reviewed. 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J.</au><au>Jensen, J. E.</au><au>Gorwitz, M. D.</au><au>Cockrum, C. A.</au><au>Johnson, S. M.</au><au>Venzor, G. M.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>MBE growth of HgCdTe on silicon substrates for large-area infrared focal plane arrays: A review of recent progress</atitle><jtitle>Journal of electronic materials</jtitle><date>1999-06-01</date><risdate>1999</risdate><volume>28</volume><issue>6</issue><spage>705</spage><epage>711</epage><pages>705-711</pages><issn>0361-5235</issn><eissn>1543-186X</eissn><coden>JECMA5</coden><abstract>We review the rapid progress that has been made during the past three years in the heteroepitaxial growth of HgCdTe infrared detector device structures on Si substrates by molecular-beam epitaxy. The evolution of this technology has enabled the fabrication of high performance, large-area HgCdTe infrared focal-plane arrays on Si substrates. A key element of this heteroepitaxial approach has been development of high quality CdTe buffer layers deposited on Si(112) substrates. We review the solutions developed by several groups to address the difficulties associated with the CdTe/Si(112) heteroepitaxial system, including control of crystallographic orientation and minimization of defects such as twins and threading dislocations. The material quality of HgCdTe/Si and the performance of HgCdTe detector structures grown on CdTe/Si(112) composite substrates is reviewed. Finally, we discuss some of the challenges related to composition uniformity and defect generation encountered with scaling the MBE growth process for HgCdTe to large-area Si substrates.</abstract><cop>Warrendale</cop><pub>Springer Nature B.V</pub><doi>10.1007/s11664-999-0058-2</doi><tpages>7</tpages></addata></record> |
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| title | MBE growth of HgCdTe on silicon substrates for large-area infrared focal plane arrays: A review of recent progress |
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