MgO thin film deposition using TVA (thermoionic vacuum arc)
TVA thin films are obtained as a result of heated cathode discharge established in vacuum condition in the vapours of the material to be deposited. Anode, a tungsten crucible filled with MgO pellets is bombarded by focused thermoelectrons accelerated toward the anode. Due to the incoming energy, MgO...
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| Veröffentlicht in: | Thin solid films 1999, Vol.343, p.63-66 |
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| container_title | Thin solid films |
| container_volume | 343 |
| creator | Ehrich, H. Musa, G. Popescu, A. Mustata, I. Salabas, A. Cretu, M. Leu, G.F. |
| description | TVA thin films are obtained as a result of heated cathode discharge established in vacuum condition in the vapours of the material to be deposited. Anode, a tungsten crucible filled with MgO pellets is bombarded by focused thermoelectrons accelerated toward the anode. Due to the incoming energy, MgO starts to evaporate and a discharge is established in the interelectrode space. This new type of evaporation, ensure high quality films due to the bombardment with energetic ions of the own material growing layer. |
| doi_str_mv | 10.1016/S0040-6090(98)01576-4 |
| format | Article |
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Anode, a tungsten crucible filled with MgO pellets is bombarded by focused thermoelectrons accelerated toward the anode. Due to the incoming energy, MgO starts to evaporate and a discharge is established in the interelectrode space. This new type of evaporation, ensure high quality films due to the bombardment with energetic ions of the own material growing layer.</description><identifier>ISSN: 0040-6090</identifier><identifier>EISSN: 1879-2731</identifier><identifier>DOI: 10.1016/S0040-6090(98)01576-4</identifier><language>eng</language><publisher>Elsevier B.V</publisher><subject>MgO thin film ; Plasma assisted deposition ; Protecting layer ; Thermionic vacuum arc</subject><ispartof>Thin solid films, 1999, Vol.343, p.63-66</ispartof><rights>1999 Elsevier Science S.A. 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| ispartof | Thin solid films, 1999, Vol.343, p.63-66 |
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| language | eng |
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| subjects | MgO thin film Plasma assisted deposition Protecting layer Thermionic vacuum arc |
| title | MgO thin film deposition using TVA (thermoionic vacuum arc) |
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