Electrical properties of (Ba,Sr)TiO sub(3) on (Sr,Ca)RuO sub(3) electrode

Electrical properties of (Ba,Sr)TiO sub(3) on (Sr,Ca)RuO sub(3) electrode

A perovskite (Sr,Ca)RuO sub(3) [SCR] electrode has been explored in order to utilize its advantages in structural match with (Ba,Sr)TiO sub(3) [BST] films, which may enhance the electrical properties of BST films. The SCR electrode led to the leakage current density (10 super(-7) A/cm super(2)) of B...

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Veröffentlicht in:Journal of materials science 1999-01, Vol.34 (24), p.6115-6119
Hauptverfasser: Son, Seung Young, Kim, Boum Seock, Oh, Se Hoon, Choi, Duck Kyun, Yoo, Cha Young, Lee, Sang In, Dai, Z R, Ohuchi, Fumio S
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container_end_page 6119
container_issue 24
container_start_page 6115
container_title Journal of materials science
container_volume 34
creator Son, Seung Young
Kim, Boum Seock
Oh, Se Hoon
Choi, Duck Kyun
Yoo, Cha Young
Lee, Sang In
Dai, Z R
Ohuchi, Fumio S
description A perovskite (Sr,Ca)RuO sub(3) [SCR] electrode has been explored in order to utilize its advantages in structural match with (Ba,Sr)TiO sub(3) [BST] films, which may enhance the electrical properties of BST films. The SCR electrode led to the leakage current density (10 super(-7) A/cm super(2)) of BST films an order lower than that on RuO sub(2). The leakage current was not sensitive to the composition of the SCR electrodes, while the dielectric constant of the BST thin film capacitor ranged from 160 to 280 depending on the Sr/Ca ratio in SCR electrodes. The BST/SCR (Sr/Ca identical with 7/3) system resulted in a 5-nm thick interfacial layer. Furthermore, the interfacial layer turned out to be partially crystallized according to the lattice image taken by an HRTEM. It is believed that such enhancement in electrical properties of BST films could be induced by the improvement of interfacial characteristics through structural matching.
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title Electrical properties of (Ba,Sr)TiO sub(3) on (Sr,Ca)RuO sub(3) electrode
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