Growth of yttria stabilized zirconia thin films by metallo-organic, ultrasonic spray pyrolysis
Randomly and preferentially oriented thin films of yttria stabilized zirconia (YSZ) have been prepared on fused quartz substrates by ultrasonic spray pyrolysis using zirconium octylate and yttrium octylate as metallo-organic precursors at a substrate temperature of 873–1023 K. The as-deposited films...
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| Veröffentlicht in: | Thin solid films 1999-02, Vol.340 (1), p.72-76 |
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| container_title | Thin solid films |
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| creator | Matsuzaki, Yoshio Hishinuma, Masakazu Yasuda, Isamu |
| description | Randomly and preferentially oriented thin films of yttria stabilized zirconia (YSZ) have been prepared on fused quartz substrates by ultrasonic spray pyrolysis using zirconium octylate and yttrium octylate as metallo-organic precursors at a substrate temperature of 873–1023 K. The as-deposited films composed of fine columnar grains were found to be crystalline and transparent with a cubic fluorite structure. With increasing substrate temperature the growth rate and diameter of the columnar grains increased and the crystal habit showed a preferential orientation at the (111) plane. |
| doi_str_mv | 10.1016/S0040-6090(98)01344-3 |
| format | Article |
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The as-deposited films composed of fine columnar grains were found to be crystalline and transparent with a cubic fluorite structure. 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| source | Elsevier ScienceDirect Journals Complete - AutoHoldings |
| subjects | Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Methods of deposition of films and coatings film growth and epitaxy Orientation Physics Spray coating techniques Spray pyrolysis Structure and morphology thickness Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology YSZ |
| title | Growth of yttria stabilized zirconia thin films by metallo-organic, ultrasonic spray pyrolysis |
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