Sampling electrostatic force probing using pulse position modulation technique

Sampling electrostatic force probing using pulse position modulation technique

A sampling electrostatic force microscopy method utilising a pulse position modulation technique is demonstrated. High frequency arbitrary waveforms within integrated circuits are measured by down converting the high frequency spectrum of the circuit waveform to within the active frequency band of t...

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Veröffentlicht in:Electronics letters 2001-08, Vol.37 (16), p.1020-1021
1. Verfasser: Said, R A
Format: Artikel
Sprache:eng
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Zusammenfassung:A sampling electrostatic force microscopy method utilising a pulse position modulation technique is demonstrated. High frequency arbitrary waveforms within integrated circuits are measured by down converting the high frequency spectrum of the circuit waveform to within the active frequency band of the mechanical frequency response of the probe.
ISSN:0013-5194
DOI:10.1049/el:20010697