Single contact optical beam induced currents

Semiconductor industry is continuously experiencing shrinking device features and a tremendous increase in the number of transistors in an integrated circuit (IC). The application of the optical beam induced currents (OBIC) technique in ICs is more difficult and mainly limited to a few transistors n...

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Veröffentlicht in:	Microelectronics and reliability 2001-08, Vol.41 (8), p.1237-1242
Hauptverfasser:	Chin, J.M, Phang, J.C.H, Chan, D.S.H, Palaniappan, M, Gilfeather, G, Soh, C.E
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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