Epitaxial growth and self-organized superlattice structures in AlGaN films grown by plasma assisted molecular beam epitaxy

Aluminum gallium nitride alloys were grown by molecular beam epitaxy and their film composition, structure and microstructure were investigated by Rutherford backscattering spectroscopy, Atomic Force Microscopy, X-ray diffraction, Transmission Electron Microscopy and High Resolution Electron Microsc...

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Veröffentlicht in:	Materials science & engineering. B, Solid-state materials for advanced technology Solid-state materials for advanced technology, 2001-12, Vol.87 (3), p.227-236
Hauptverfasser:	Iliopoulos, E., Ludwig, K.F., Moustakas, T.D., Komninou, Ph, Karakostas, Th, Nouet, G., Chu, S.N.G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties Materials science Methods of deposition of films and coatings film growth and epitaxy Molecular beam epitaxy Molecular, atomic, ion, and chemical beam epitaxy Physics Structure and morphology thickness Superlattice structures Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology X-ray diffraction
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