PZT-based piezoelectric composites via a modified sol–gel route

A novel hybrid sol–gel approach is developed to prepare composite PZT films in the thickness range 1–20 μm at relatively low sintering temperatures (

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Veröffentlicht in:Journal of the European Ceramic Society 2001, Vol.21 (10), p.1535-1538
Hauptverfasser: Kholkin, A.L., Yarmarkin, V.K., Wu, A., Avdeev, M., Vilarinho, P.M., Baptista, J.L.
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container_end_page 1538
container_issue 10
container_start_page 1535
container_title Journal of the European Ceramic Society
container_volume 21
creator Kholkin, A.L.
Yarmarkin, V.K.
Wu, A.
Avdeev, M.
Vilarinho, P.M.
Baptista, J.L.
description A novel hybrid sol–gel approach is developed to prepare composite PZT films in the thickness range 1–20 μm at relatively low sintering temperatures (
doi_str_mv 10.1016/S0955-2219(01)00058-9
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source Elsevier ScienceDirect Journals
subjects Coating techniques
Composite materials
Composites
Dielectric properties
Ferroelectricity
Film preparation
PZT
Silicon
Sintering
Sol-gels
Sol–gel method
Substrates
Thickness measurement
title PZT-based piezoelectric composites via a modified sol–gel route
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