Preparation and characterization of TiO2 thin films by the sol-gel process
Titanium dioxide (TiO2) thin films have been prepared on microscope slide by the sol-gel process. The preparation of covering solution is investigated with the method of orthogonal experimental design, and the heat treatment temperature and time, which influenced on the films properties are discusse...
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| Veröffentlicht in: | Journal of materials science 2001-01, Vol.36 (24), p.5923-5926 |
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| container_end_page | 5926 |
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| container_issue | 24 |
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| container_title | Journal of materials science |
| container_volume | 36 |
| creator | Wen, Tianfa Gao, Jianping Shen, Juyun Zhou, Zhongshen |
| description | Titanium dioxide (TiO2) thin films have been prepared on microscope slide by the sol-gel process. The preparation of covering solution is investigated with the method of orthogonal experimental design, and the heat treatment temperature and time, which influenced on the films properties are discussed. And the TiO2 thin films had been studied by the means of differential thermal analysis (DTA), X-ray diffraction (XRD) and scanning electron microscopy (SEM). |
| doi_str_mv | 10.1023/A:1012989012840 |
| format | Article |
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The preparation of covering solution is investigated with the method of orthogonal experimental design, and the heat treatment temperature and time, which influenced on the films properties are discussed. 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The preparation of covering solution is investigated with the method of orthogonal experimental design, and the heat treatment temperature and time, which influenced on the films properties are discussed. And the TiO2 thin films had been studied by the means of differential thermal analysis (DTA), X-ray diffraction (XRD) and scanning electron microscopy (SEM).</abstract><cop>Heidelberg</cop><pub>Springer</pub><doi>10.1023/A:1012989012840</doi><tpages>4</tpages></addata></record> |
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| ispartof | Journal of materials science, 2001-01, Vol.36 (24), p.5923-5926 |
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| subjects | Cross-disciplinary physics: materials science rheology Design of experiments Differential thermal analysis Exact sciences and technology Heat treatment Liquid phase epitaxy deposition from liquid phases (melts, solutions, and surface layers on liquids) Materials science Methods of deposition of films and coatings film growth and epitaxy Physics Scanning electron microscopy Sol-gel processes Thin films Titanium dioxide |
| title | Preparation and characterization of TiO2 thin films by the sol-gel process |
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