A novel piezo vibration platform for probe dynamic performance calibration

Contact probe measurement is widely used in measurements of surface roughness, roundness, form and coordinates. A novel piezo vibration platform of compact size [120 x 120 x 120 mm(super3)] for stylus probe dynamic performance calibration has been developed. A piezo tube is employed to generate move...

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Veröffentlicht in:	Measurement science & technology 2001-09, Vol.12 (9), p.1509-1514
Hauptverfasser:	Liang, Rong, Jusko, Otto, Lüdicke, Frank, Neugebauer, Michael
Format:	Artikel
Sprache:	eng
Schlagworte:	Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Interferometers Metrology Metrology, measurements and laboratory procedures Optical instruments, equipment and techniques Physics Units and standards
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