Novel micromachined membrane mirror characterization and closed-loop demonstration

Micromachined electrostatic membrane mirrors have been in use for several years in active and adaptive optics applications. We introduce a deformable mirror with small static aberrations and resistant to damage during electrostatic snap-down in an architecture designed so that a multi-layer dielectr...

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Veröffentlicht in:	Optics communications 2001-12, Vol.200 (1), p.99-105
Hauptverfasser:	Dayton, David C., Mansell, Justin D., Gonglewski, John D., Restaino, Sergio R.
Format:	Artikel
Sprache:	eng
Schlagworte:	Adaptive optics Atmospheric optics Exact sciences and technology Fundamental areas of phenomenology (including applications) Membrane mirror Optics Physics Remote sensing lidar and adaptive systems
Online-Zugang:	Volltext
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