Anode mode in cathodic arc deposition apparatus with various cathodes and ambient gases

The anode mode of a vacuum arc in a cathodic arc deposition apparatus was observed as a function of ambient gas pressure ranging from 0.01 to 300 Pa. The chamber (400 mm in diameter and 600 mm in length) made of stainless steel (SUS304) acted as the anode. The arc was operated at a relatively low co...

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Veröffentlicht in:	Thin solid films 2001-06, Vol.390 (1), p.192-196
Hauptverfasser:	Miyano, R, Saito, T, Kimura, K, Ikeda, M, Takikawa, H, Sakakibara, T
Format:	Artikel
Sprache:	eng
Schlagworte:	Ambient gas Anode mode Cathode material Cathodic arc deposition apparatus Cross-disciplinary physics: materials science rheology Exact sciences and technology Ion and electron beam-assisted deposition ion plating Materials science Methods of deposition of films and coatings film growth and epitaxy Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma applications Pressure dependence
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