A simulation based analysis of cycle time distribution, and throughput in semiconductor backend manufacturing

This paper presents a preliminary analysis of the relationship between selected input and output variables in semiconductor backend manufacturing system, using a data driven discrete event simulation model. This study is of interest and importance for a better understanding of the controllable input...

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Veröffentlicht in:Computers in industry 2001-05, Vol.45 (1), p.59-78
Hauptverfasser: Sivakumar, Appa Iyer, Chong, Chin Soon
Format: Artikel
Sprache:eng
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