Measurements and diagnostics of diamond films and coatings

The commercial potential of chemical-vapor-deposited (CVD) diamond films has been established and a number of applications have been identified through university, industry, and government research studies. This paper discusses the methodologies used for property measurement and diagnostic of CVD di...

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Veröffentlicht in:	Measurement : journal of the International Measurement Confederation 2001-03, Vol.29 (2), p.113-126
Hauptverfasser:	Miyoshi, Kazuhisa, Wu, Richard L.C
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical-vapor-deposited (CVD) diamond Diagnostic methodology Exact sciences and technology Films and coatings Instruments, apparatus, components and techniques common to several branches of physics and astronomy Laboratory procedures Measurement Metrology Metrology, measurements and laboratory procedures Physics Scanning probe microscopes, components and techniques Testing and inspecting procedures Testing, inspecting procedures X- and γ-ray instruments and techniques
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